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Accurate Measurements of Cross-plane Thermal Conductivity of Thin Films by Dual-Frequency Time-Domain Thermoreflectance (TDTR)

机译:精确测量薄膜的跨平面导热系数   通过双频时域温度反射(TDTR)

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摘要

Accurate measurements of the cross-plane thermal conductivity {\Lambda}_crossof a high-thermal-conductivity thin film on a low-thermal-conductivity({\Lambda}_s) substrate (e.g., {\Lambda}_cross/{\Lambda}_s>20) are challenging,due to the low thermal resistance of the thin film compared to that of thesubstrate. In principle, {\Lambda}_cross could be measured by time-domainthermoreflectance (TDTR), using a high modulation frequency f_h and a largelaser spot size. However, with one TDTR measurement at f_h, the uncertainty ofthe TDTR measurement is usually high due to low sensitivity of TDTR signals to{\Lambda}_cross and high sensitivity to the thickness h_Al of Al transducerdeposited on the sample for TDTR measurements. We observe that in most TDTRmeasurements, the sensitivity to h_Al only depends weakly on the modulationfrequency f. Thus, we performed an additional TDTR measurement at a lowmodulation frequency f_0, such that the sensitivity to h_Al is comparable butthe sensitivity to {\Lambda}cross is near zero. We then analyze the ratio ofthe TDTR signals at f_h to that at f_0, and thus significantly improve theaccuracy of our {\Lambda}cross measurements. As a demonstration of thedual-frequency approach, we measured the cross-plane thermal conductivity of a400-nm-thick nickel-iron alloy film and a 3-{\mu}m-thick Cu film, both with anaccuracy of ~10%. The dual-frequency TDTR approach is useful for future studiesof thin films.
机译:精确测量低导热率({\ Lambda} _s)基板(例如{\ Lambda} _cross / {\ Lambda}上的高导热率薄膜的跨平面导热率{\ Lambda} _cross _s> 20)是有挑战性的,因为与衬底相比,薄膜的热阻低。原则上,可以使用高调制频率f_h和较大的激光光斑大小通过时域热反射(TDTR)来测量{\ Lambda} _cross。然而,在f_h进行一次TDTR测量时,由于TDTR信号对交叉的低灵敏度和对沉积在样品上用于TDTR测量的Al换能器的厚度h_A1的高灵敏度,TDTR测量的不确定性通常较高。我们观察到,在大多数TDTR测量中,对h_A1的灵敏度仅弱地取决于调制频率f。因此,我们在低调制频率f_0上执行了额外的TDTR测量,使得对h_A1的灵敏度可比但对{\ Lambda} cross的灵敏度接近零。然后,我们分析了f_h处的TDTR信号与f_0处的TDTR信号之比,从而显着提高了{\ Lambda}交叉测量的准确性。作为双频方法的证明,我们测量了厚度为400nm的镍铁合金薄膜和厚度为3μm的Cu薄膜的跨平面热导率,两者的精确度均为〜10%。双频TDTR方法对于将来的薄膜研究很有用。

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